장비명
규격
측정범위
제작사
주용도
Air Partcle Counter
2100C
0.1/0.2/0.3/0.5/0.7/1.0㎛ ,
1.0cfm
PSI
청정도측정, Filter Leak Test
Air Partcle Counter
2400
0.3/0.5/1.0/3.0/5.0/10.0㎛ ,
1.0cfm
PSI
청정도측정, Filter Leak Test
Air Partcle Counter
CNC1107
0.01㎛, 0.05cfm
PSI
청정도측정
Air Partcle Counter
237B
0.3/0.5/1.0/3.0/5.0㎛ ,
1.0cfm
PSI
청정도측정
Air Partcle Sensor
R4803/R4903
0.3/0.5㎛ , 1.0cfm
PSI
청정도 Monitoring
High Pressure Diffuser
HPD
0.1/1.0cfm
PSI
Gas Particle 측정
Vacuum Particle Counter
70XE
0.17㎛
PSI
Vacuum Particle monitoring
Smoke Profile Tester
AS-1
KITAKAWA
기류 분석
3-Dimension Anemometer
WA-590
0~10m/sec
KAIJO
풍속,기류 분석
Air Flow & Temp. Monitor
ATM-24
0.15~0.75m/sec
-5~70℃ DB
CA
풍속,온도 분석
Air Grid
AG-100
0.15~0.75m/sec
CA
풍속 측정
Air Velocity Meter
8386
0~50m/sec
5~60 DB, 0~95 RH
12.7~38.1mmAq
TSI
풍속,온습도,차압 측정
ASMAN Temp./Humi. Meter
7450
0~50 ℃DB, 0~100%RH
SATO
온습도 측정
Temp./Humi. Recoder
R704
-15~50 ℃DB, 0~100%RH
SATO
온습도monitoring
Temp./Humi. Logger
SP-2000
-40~70 ℃DB, 0~95%RH
VERITEQ
온습도monitoring
Electrostatic Field Meter
775pvs
±19.99KV
ISI
정전기 측정
Electrostatic Verification Sys.
775pvs
±19.99KV
ISI
정전기 분석
Charge Plate Monitor
210
1~5,000V
ISI
정전기 분석
ESD Monitor
5315
±5,000V
NOVX
정전기monitoring
Surface Resistivity Meter
Mini Meg
1~10,000㏁/sq
ESD
표면저항 측정
Vibration Meter
VM-82
0.02~200
0.1~1,000
0.01~100 ㎚
RION
진동 측정
Sound Level Meter
NA-26
30~130dB
RION
소음 측정
Lux Meter
DX-100
0~200,000Lux
INS
조도 측정
Tacho Meter
DT-206
60~30,000rpm
SHIMPO
회전수 측정
Clamp-on Meter
SDC90A
0~1.000A, 0~400VDC, 0~600VAC, 0~40,000Ω
SUMMIT
전류,전압,저항 측정
Moisture Analyzer
Tracer
0~2,000ppb
MECCO
gas 수분분석